PRODUCTS
EMISSION MICROSCOPE 세부사항
Emission Microscope란 눈으로 볼 수 없는 것들(Hot Electrons, Thermal effects,…)을 특수한
camara로 detact하여 모니터상으로 확인시켜주는 장비이다. 현재 사용되는 ATE (Teradyne,
Advantest, Agilent, IMS, Yokogawa, 스렘버그…)와 함께 쓰이며 다루기에 편리하게 portable
방식을 취하고 있으며 탁월한 성능을 자랑하는데 반해 매우 저렴한 장비로 많은 사랑을 받고 있다.
Features Integrated Analytical Tools for Failure Analysis / Primarily a Qualitative tool
Circuit image and emission image from CCD camera
Imaging and emission detection from the backside
NIR illumination to image the device through the thinned polished silicon
Long working distance NIR objectives
Vibration coupling to capture clear images even at high magnification
A variety of configurations: a stand alone benchtop unit, integrated to probe stations, directly on a test head for package and wafer level analysis
High resolution / Lower cost / Ease of use
Vectored Emission Microscopy possible
No interlock protection needed
Fast frame rate 1/30 second and interline
Low noise
Detection Hole-Electron recombination(Annihilation) : nterband (Forward) / Intraband (Avalanche) / Bremsstrahlung (Braking radiation) Spectrum
Thermally generated photons(Infrared to visible)
Spark Gap Phenomena (Intermittent - Spectrum)
| Item | FA-1000 | FA-2000 |
| CCD Sensor Resolution Sensitivity determined by CCD Cooling Spectral Response Frame Rate | 768X494 pixel Intergration Time Water cooled CD Sensor 400-1050nm 1/30 secong to 240 minutes | 1280 x 1024 pixels Pixel Binning (up to 8X32, this provides both higher sensitivity and a higher signal to noise ratio) 2 stage Peltier Cooling (provides a more reliable solid state cooling system and low temperature for increased signal sensitivity) 280-1200nm/ 1/30 secong to 50 minutes integration time (with 8X8) |
| Controller Software | integration time intel P-4 256M FA-1000 Window 98, 2x | pixel Binning the sensitivity of the 240 minute integration can be achieved in 3.75 mintes) Intel P-4 256MB RAM, CD/ZIP Drives FA-2000 Windows 98, 2x |