Doublesided/Backside Probe Station HIT
| 특징 350PM |
* Wafer are mounted in an elevated wafer carrier assembly which mount on prober base frame
* Dual top side platens for backside probing
* Micomanipulator offers two solutions A conventional
* Horizontal” system A unique (pat. pending) “Vertical”approach
* Two sets of platens for Doublesided capability
* 특수 제작된 Wafer Carrier는 안전하게 Wafer를 vacuum hold down 한다. |
| 특징 S6 & S8 |
* Emission Microscopy
* Opical Device Characterization
* Multi-layer failure analysis
* MEMS |
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